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DC Through Low-Frequency Power-Delivery Essentials

This class dispels the mysteries of plasma processes and power delivery. Novices and experts alike will learn about the capabilities and limitations of DC, pulsed DC, and low-frequency (40 to 400 kHz) power supplies for various processes.

Students will learn about arcing, including what causes arcs and how they can be managed to maximize process efficiency and product yields. This course also covers troubleshooting fundamentals that will help your employees quickly isolate suspect power supplies from a system problem. The hands-on lab session with a custom plasma system has proven effective in demonstrating the concepts discussed during lecture, enabling students to immediately begin implementing skills learned in this class.

Benefits Features
  • Reduce tool cost of ownership 
  • Optimize tool productivity 
  • Increase troubleshooting and diagnostic skills 
  • Increase process understanding 
  • Improve yields by optimizing tool performance 
  • Understand what arcing is 
  • Learn essential grounding concepts 
  • Isolate suspect power supplies from system problems 
  • Discover when and why to use DC, pulsed DC, or AC 


資料ダウンロード

DC through Low-Frequency Power-Delivery Essentials data sheet
DC Pulsing Products: Proven Benefits for Reactive & Conductive Sputtering brochure
PDX® High-Power Series data sheet
PDX® Low-Power Series data sheet
E'Wave® Bipolar Pulsed DC Power Supply brochure
PEII Low-Frequency Power Supplies: 5 kW to 60 kW brochure
MDX 1 kW and 1.5 kW Magnetron Drives brochure
MDX Series 500 W Magnetron Drive brochure
AE Global Services brochure

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